WEISUN AGV Auto-Oven
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Features
- Full-Automation, Intergrate AGV/MGV & Oven, data upload to Server directly, attain Unmaaned status. (non-operator)
Product Information
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Oven ( PLC Base ):
A. Temperature: RT~450 degree C B. Uniformity: +/- 2 degree C C. O2 Density: <50ppm D.Cooling: N2 E. Capacity: Customerize F. Adapter EQ: AGV / MGV -
Program:
GUI Interface, For -
Process:
Wafer / Substrate Curing, PR/PI, Baking & Curing. Focus on Wafer level & Panel Fan-out solution.