GL 晶圓表面有機污染物分析系統
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產品特色
- A silicon wafer can be analyzed keeping its complete form.
- Each component can be qualified individually out of numberous organic compounds on the silicon wafer surface by means of gas chromatography
- Less than a few pg/cm2 trace organic compound on the wafer surface can be analyzed
產品資訊
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原廠名稱
G.L. Sciences -
製程名稱
SMT -
英文名稱
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產品細目
其他
